MKS Remote Plasma Refurbishment Data Sheet : Outlines maintenance procedures and service center information.
A: Technically, yes. The 0-10 V output on the rear panel can drive a digital panel meter. However, the front meter’s logarithmic response is non-linear; a digital voltmeter reading requires the formula above. mks astron 2l manual
Companies like PTB Sales often host PDF manuals for the AX series and related Astron models. MKS Remote Plasma Refurbishment Data Sheet : Outlines
A: Some early Astron 2L models require an external degas trigger. Consult your specific revision’s manual to add a momentary switch to the rear remote port. Consult your specific revision’s manual to add a
: By generating reactive species remotely, it reduces wear and tear on the process chamber compared to in-situ RF methods. Technical Specifications
: Requires water cooling with a minimum flow of 2.0 gpm during operation and 0.5 gpm during idle.