Before fitting peaks, you must subtract the background (noise caused by inelastic scattering).
XPSPEAK 4.1 is a lightweight Windows application. Because it is legacy freeware, it is often hosted on university or software repository sites. xps peak fit 41 new download
: Researcher Jens Uhlig's personal webpage also provides mirrors for both the software and the manual. Core Functionality Before fitting peaks, you must subtract the background